Journal of The Electrochemical Society · 1991 · 14 citations · 0 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsOptoelectronicsThin FilmsChemical Vapor DepositionMetal SulfidesOptical Thin FilmsOptoelectronic MaterialsSemiconductor Device MaterialsThin Film Optical PropertiesAnnealing Temperature EffectsLow-pressure Chemical Vapor DepositionMagnetron SputteringMetal Sulfide Thin FilmsPhotoluminescenceThermal EvaporationThin-film Optoelectronic MaterialsZinc Sulfides
Thin films of thulium‐activated have been deposited on glass, sapphire, and dielectric‐coated silicon by thermal evaporation, RF magnetron sputtering, and low pressure chemical vapor deposition. Films have been annealed under different atmospheres (vacuum, , and ) and a range of temperatures (450–800°C) to determine the effect on the emission properties. Photoluminescence measurements show that , halide films emit almost exclusively in the near‐infrared (800 nm), whereas sputtered ,Li films are intense blue (478 nm) emitters after annealing in at 800°C.