Precise Semiconductor Nanowire Placement Through Dielectrophoresis

Abstract

We demonstrate the ability to precisely control the alignment and placement of large numbers of InAs nanowires from solution onto very narrow, prepatterned electrodes using dielectrophoresis. An understanding of dielectrophoretic behavior associated with such electrode geometries is essential to development of approaches for assembly of intricate nanowire systems. The influence of signal frequency and electrode design on nanowire manipulation and placement is examined. Signal frequencies in the range of 10 MHz are found to yield high percentages of aligned nanowires on electrodes with dimensions similar to that of the nanowire. Strategies for further improvement of nanowire alignment are suggested and analyzed.