Rapid Preparation of Lead Titanate Sputtering Target Using Spark‐Plasma Sintering

Abstract

PbTiO 3 sputtering targets 8 cm in diameter were prepared using spark‐plasma sintering (SPS) for relatively short periods, ∼2 min. Submicrometer‐sized PbTiO 3 powders with a relatively large size distribution were densified to ∼86% of the theoretical X‐ray density using the SPS process. In contrast, large‐sized (8 cm in diameter) ceramics could not be prepared from starting powders with a relatively narrow particle‐size distribution. Formation of cracks in the large PbTiO 3 targets was observed when samples were prepared under higher pressures (>50 MPa) or at higher temperatures (>900°C). Crack formation was attributed to unrelaxed internal stress originating from lower pore contents and from an inhomogeneous distribution of cations in the ceramics prepared under these conditions.