An isolated tunable capacitor with a linear capacitance-voltage behavior

Abstract

A unique tunable capacitor has been designed that facilitates a completely isolated capacitance and a truly linear capacitance-voltage behavior. Using a low-temperature adhesive bonding process and device layer transfer techniques, a linear analog tunable capacitor has been fabricated and tested. The device shows a linear capacitance-voltage behavior using a +-10 V input voltage and tunes over a 1.78 to 3.88 pf range. The isolated design also allows greater flexibility in circuit design because the capacitor is not required to be a capacitor to ground.