High-speed bulk InGaAsP-InP electroabsorption modulators with bandwidth in excess of 20 GHz

Abstract

Bulk InGaAsP-InP electroabsorption optical modulators with high extinction ratio, low drive voltage, and high modulation bandwidth at lambda =1.3 mu m are reported. The devices have a tapered-fiber-to-modulator-to-tapered-fiber extinction ratio greater than 20 dB at a drive voltage of <5 V. Very low capacitance modulators (<0.2 pF) were fabricated using SiO/sub 2/ bonding pad isolation, resulting in a measured electrical modulation bandwidth in excess of 20 GHz.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>