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Critical Temperature Tuning of Ti/TiN Multilayer Films Suitable for Low Temperature Detectors

Materials ScienceMaterials EngineeringEngineeringCritical Temperature TuningLow Temperature DetectorsApplied PhysicsThin Film Process TechnologyThin FilmsThermal SensorMicroelectronicsChemical Vapor DepositionDepth-graded Multilayer CoatingThin Film Processing