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Improved production efficiency of mesoporous silicon nanoparticles by pulsed electrochemical etching

Materials ScienceChemical EngineeringEngineeringNanoscale ChemistryNanoporous MaterialNanomaterialsNanotechnologyMicrofabricationChemistryProduction EfficiencyMesoporous Silicon NanoparticlesElectrochemical ProcessPlasma EtchingPulsed Electrochemical EtchingSilicon On Insulator