Experimental Thermal and Fluid Science · 2008 · 96 citations · 15 references
EngineeringMaterials ScienceMetrologySensorsThin FilmsOptical SensorsSurface MetrologyChromatic Confocal MeasurementColor SensorsFilm ThicknessFilm Thickness MeasurementFlat Plate SystemsLiquid Film ThicknessThin-film Optical Characterization
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