Publication | Closed Access
Activation energy for Pt<sub>2</sub>Si and PtSi formation measured over a wide range of ramp rates
16
Citations
16
References
1995
Year
Ptsi FormationEngineeringPhysicsApplied PhysicsPhysical ChemistrySemiconductor Device FabricationSilicon On InsulatorActivation EnergyRamp Rates
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