dc electric field tunable bulk acoustic wave solidly mounted resonator using SrTiO3

Abstract

A tunable SrTiO3 solidly mounted bulk acoustic wave resonator has been designed, fabricated, and tested. The solidly mounted resonator was implemented using an acoustical Bragg reflector of alternating high and low acoustic impedance layers. The resonator demonstrated a frequency tunability of 1%, from 5.87to5.81GHz with an applied bias of 0–7.5V, respectively. A return loss of −6.5dB was observed at an applied bias of 7.5V. The quality factor at the resonant frequency was 78 and relatively constant with applied bias. The effective electromechanical coupling coefficient was 2% and near linear with applied bias.