Two-dimensional fluid model simulation of bell jar top inductively coupled plasma

Abstract

In the present paper, argon (Ar) plasmas in a bell jar inductively coupled plasma (ICP) source are systematically studied over pressures from 5 to 20 mtorr and power inputs from 0.2 to 0.5 kW. In this study, both a two-dimensional (2-D) fluid model simulation and global model calculation are compared. The 2-D fluid model simulation with a self-consistent power deposition is developed to describe the Ar plasma behaviour as well as predict the plasma parameter distributions. Finally, a quantitative comparison between the global model and the fluid model is made to test their validity.