Publication | Closed Access
Sputtering yield of Cu and Ag at target temperatures close to the melting point
21
Citations
8
References
1986
Year
Materials ScienceMaterials EngineeringEngineeringPhysicsSurface ScienceApplied PhysicsMetallurgical InteractionMetallurgical ProcessMelting PointChemical DepositionTarget TemperaturesMetallurgical SystemElemental MetalMicrostructure
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