High-power vertical-cavity surface-emitting arrays

Abstract

We present record output power levels (a few hundred Watts) in continuous-wave (CW) and quasi-CW (QCW) from 2D vertical-cavity surface-emitting laser (VCSEL) arrays, corresponding to power densities exceeding 1kW/cm² in CW and 3.5kW/cm² in QCW. These VCSEL arrays emit around 975nm with narrow spectral width (<1nm) and excellent wavelength stability (<0.07nm/K). Peak power conversion efficiency of properly designed arrays exceeds 50%. Additional features of these arrays include emission in a circular, low-diverging beam, and reliable high-temperature operation. These arrays can also be operated reliably in short pulses (<200nsec) at many times their roll-over CW current, making them useful for high-energy applications. VCSEL arrays with 2.2kW peak output power operating under 100nsec pulse-width have been demonstrated.