Publication | Closed Access
Niobium nitride films formed by rapid thermal processing (RTP): a study of depth profiles and interface reactions by complementary analytical techniques
17
Citations
17
References
2004
Year
Materials ScienceEngineeringSurface ScienceApplied PhysicsComplementary Analytical TechniquesThin FilmsInterface ReactionsChemical Vapor DepositionThin Film ProcessingRapid Thermal Processing
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