Concepedia

Publication | Closed Access

Characterization on polymerized thin films for low-k insulator using PECVD

DOI

22

Citations

8

References

2007

Year

I.-S. Bae, S.-J. Cho, Won Seok Choi, H.J. Cho, B. Hong, Hyun‐Dam Jeong, Jin‐Hyo Boo
Progress in Organic Coatings

References

YearCitations

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