Publication | Closed Access
Structure and morphology evolution of ALN films grown by DC sputtering
46
Citations
9
References
2004
Year
Materials ScienceMaterials EngineeringAln FilmsAluminium NitrideMorphology EvolutionEngineeringSurface ScienceApplied PhysicsChemical DepositionChemical Vapor DepositionThin Film ProcessingMicrostructure
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