Laser microprobe fourier transform mass spectrometry. Preliminary results for feasibility and evaluation

Abstract

Abstract The feasibility is reported of coupling a laser microprobe sampling system with a Fourier transform mass spectrometer (FTMS) for surface characterization. Analysis of an integrated circuit chip demonstrates capabilities for focusing the laser on a selected spot on a sample surface. Analysis of a model glass sample for which high resolution is required to separate metal ions from metal oxide ions emphasizes the advantages of coupling such a sampling system to an FTMS instrument.