Growth of Strontium Titanate Thin Films of Controlled Thickness by the Hydrothermal–Electrochemical Method

Abstract

Strontium titanate thin films were grown on titanium electrodes up to ca. 2 μm in thickness by a hydrothermal–electrochemical method using electrolysis performed potentiostatically by the three‐electrode cell technique. The film thickness increased monotonically with an increase in the quantity of electricity passed through the Ti electrode, and could be controlled accurately by this factor. Grown films were composed of a surface layer having an invariant thickness of ca. 0.2 μm and an inner layer grown by electrolysis. The lattice parameter of the cubic SrTiO 3 film was analyzed to be 3.919 A.