Concepedia

Publication | Closed Access

High Temperature Annealing Studies on the Piezoelectric Properties of Thin Aluminum Nitride Films

DOI

17

Citations

5

References

2007

Year

Richard A. Farrell, Vincent R. Pagán, A. Kabulski, Sridhar Kuchibhatla, John Harman, Kalyan Kasarla, L. E. Rodak, J. Peter Hensel, Parviz Famouri, D. Korakakis
MRS Proceedings

References

YearCitations

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