2002 · 17 citations · 0 references
PhotonicsOptical MaterialsEngineeringSimple Thermal ActuatorOptical Transmission SystemMicrofabricationOptical PropertiesApplied PhysicsSilicon-mems DeviceGold/silicon Attenuation VaneMicroactuatorInstrumentationMicro-optical ComponentMicroelectronicsOptoelectronicsOptical SensorsMicro-electromechanical System
The need for smaller and more capable attenuators has motivated the application of MEMS technology to produce a compact variable optical attenuator suitable for optical telecommunications environments. In this paper we describe a silicon-MEMS device that employs a simple thermal actuator to variably move a gold/silicon attenuation vane into the optical path.