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A high-quality multilayer structure characterization method based on X-ray fluorescence and Monte Carlo simulation

X-ray CrystallographyMaterials ScienceX-ray SpectroscopyEngineeringMicroscopyMaterials CharacterizationApplied PhysicsStructure DeterminationX-ray DiffractionMonte Carlo SimulationMedicineCrystallographyBiophysicsX-ray Fluorescence