Influence of substrate temperature on formation of ultrananocrystalline diamond films deposited by HFCVD argon-rich gas mixture - Concepedia

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Influence of substrate temperature on formation of ultrananocrystalline diamond films deposited by HFCVD argon-rich gas mixture

59

Citations

40

References

2009

Year

Divani C. Barbosa, F.A. Almeida, R.F. Silva, N.G. Ferreira, V.J. Trava-Airoldi, E.J. Corat

Diamond and Related Materials

Materials ScienceDiamond-like CarbonEngineeringSurface ScienceApplied PhysicsSubstrate TemperatureThin FilmsChemical DepositionUltrananocrystalline Diamond FilmsChemical Vapor DepositionThin Film Processing

References

	Year	Citations

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