Publication | Closed Access
Selective fabrication of n‐ and p‐type SnO films without doping
22
Citations
28
References
2015
Year
Materials ScienceMaterials EngineeringSn TargetEngineeringNanotechnologyOxide ElectronicsOptoelectronic MaterialsApplied PhysicsSelective FabricationP‐type Tin MonoxideSemiconductor MaterialOptoelectronic DevicesThin Film Process TechnologyThin FilmsPulsed Laser DepositionCompound SemiconductorThin Film Processing
Undoped n‐ and p‐type tin monoxide (SnO) films have been selectively fabricated by pulsed laser deposition with a Sn target and careful control of oxygen partial pressure. The films are epitaxially grown in optimal growth conditions on yttria‐stabilized zirconia (YSZ) substrates with out‐of‐plane and in‐plane orientation relationships of (001) SnO //(001) YSZ and [110] SnO //[100] YSZ , respectively. Both Seebeck and Hall measurements show consistent results on the carrier types of the films. The electron Hall mobility is approximately 11 cm 2 /Vs at room temperature and the carrier activation energy is 0.14 eV for the n‐type film. The growth at increased oxygen partial pressure yields p‐type films, demonstrating the selective fabrication of both n‐ and p‐type SnO films without doping. (© 2015 WILEY‐VCH Verlag GmbH &Co. KGaA, Weinheim)
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