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An Inverse Approach for Extracting Elastic–plastic Properties of Thin Films from Small Scale Sharp Indentation

Materials ScienceEngineeringMechanical PropertiesMechanical BehaviorElasticity (Physics)Mechanical EngineeringInverse ApproachSolid MechanicsThin Film Process TechnologyExtracting Elastic–plastic PropertiesPlasticityThin FilmsMechanics Of MaterialsThin Film Processing