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Raman spectroscopy study of amorphous SiGe films deposited by low pressure chemical vapor deposition and polycrystalline SiGe films obtained by solid-phase crystallization

Materials ScienceRaman Spectroscopy StudyAmorphous Sige FilmsEngineeringOptical PropertiesSilicon On InsulatorApplied PhysicsThin FilmsAmorphous SolidPolycrystalline Sige FilmsChemical Vapor DepositionThin Film Processing