Monolithically integrated multi-wavelength laserbyselective area growth with metal organic vapour phase epitaxy

Abstract

A multi-wavelength laser (MWL) is fabricated by means of selective area growth (SAG) with metal organic vapour phase epitaxy (MOVPE). The MWL consists of an array of amplifiers monolithically integrated with a transmissive (de-)multiplexer and, to the authors' knowledge, is the first device of this kind realised with only two growth steps making use of SAG MOVPE.