Vapor phase synthesis of aligned ZnO nanorod arrays from elements

Abstract

A vapor phase process is described for the synthesis of one-dimensional zinc oxide nanocrystal arrays. Using this process, well-aligned ZnO nanorod arrays are grown on (100) Si substrates with no catalyst. Cathodoluminescence, x-ray diffraction, and electron microscopy results demonstrate that the nanorods are characterized by high purity, stoichiometric composition, and perfect crystal structure.