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Physical and electrical properties of ZrO2 and YSZ high-k gate dielectric thin films grown by RF magnetron sputtering

Materials EngineeringMaterials ScienceElectrical EngineeringSemiconductor DeviceEngineeringNanoelectronicsOxide ElectronicsApplied PhysicsRf MagnetronSemiconductor MaterialThin FilmsMicroelectronicsElectrical PropertiesThin Film ProcessingElectrical Insulation