Concepedia

Reactive ion Etching of Pt/PbZr<sub>x</sub>Ti<sub>1−x</sub>O<sub>3</sub>/Pt Integrated Ferroelectric Capacitors

J. J. Van Glabbeek, G. A. C. M. Spierings, M.J.E. Ulenaers, G. J. M. Dormans, P.K. Larsen

MRS Proceedings · 1993 · 43 citations · 9 references

DOI

Concepts

References

9

Ferroelectric Memories

J. F. Scott, Carlos A. Paz de Araújo · Science · 1989 · 3.8K citations

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Processing and electrical properties of Pb (Zr<i>x</i>Ti1−<i>x</i>)O3 (<i>x</i>=0.2–0.75) films: Comparison of metallo-organic decomposition and sol-gel processes

M. Klee, R. Eusemann, Rainer Waser et al. · Journal of Applied Physics · 1992 · 205 citations

, , +17

Ferroelectric memories

P.K. Larsen, R. Cuppens, G. A. C. M. Spierings · Ferroelectrics · 1992 · 151 citations

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Preparation and ferroelectric properties of PbZr0.53Ti0.47O3 thin films by spin coating and metalorganic decomposition

G. A. C. M. Spierings, M.J.E. Ulenaers, G. L. M. Kampschöer et al. · Journal of Applied Physics · 1991 · 143 citations

, , +16

Reactive Ion Etching of Sputtered PbZr<sub>1-x</sub>Ti<sub>x</sub>O<sub>3</sub> Thin Films

Katsuaki Saito, Jai Ho Choi, Takuya Fukuda et al. · Japanese Journal of Applied Physics · 1992 · 53 citations

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