Reactive ion Etching of Pt/PbZr<sub>x</sub>Ti<sub>1−x</sub>O<sub>3</sub>/Pt Integrated Ferroelectric Capacitors - Concepedia

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Reactive ion Etching of Pt/PbZr<sub>x</sub>Ti<sub>1−x</sub>O<sub>3</sub>/Pt Integrated Ferroelectric Capacitors

43

Citations

9

References

1993

Year

J. J. Van Glabbeek, G. A. C. M. Spierings, M.J.E. Ulenaers, G. J. M. Dormans, P.K. Larsen

MRS Proceedings

Materials EngineeringMaterials ScienceEngineeringFerroelectric ApplicationApplied PhysicsReactive Ion EtchingMicroelectronics

References

	Year	Citations

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