Publication | Closed Access
Physical and chemical sputtering of graphite and SiC by hydrogen and helium in the energy range of 600 to 7500 eV
114
Citations
11
References
1976
Year
Materials EngineeringMaterials ScienceDiamond-like CarbonEngineeringCarbon-based MaterialPhysicsEnergy RangeApplied PhysicsGrapheneHydrogenChemical SputteringCarbide
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