Publication | Closed Access
Optical and surface analysis of DC-reactive sputtered AlN films
81
Citations
33
References
2003
Year
Materials ScienceAluminium NitrideOptical MaterialsEngineeringSurface ScienceApplied PhysicsThin Film Process TechnologyThin FilmsThin Film ProcessingAln Films
| Year | Citations | |
|---|---|---|
Page 1
Page 1