Publication | Closed Access
3D silicon sensors: Design, large area production and quality assurance for the ATLAS IBL pixel detector upgrade
113
Citations
32
References
2012
Year
3D Ic ArchitectureQuality AssuranceEngineeringRadiation DetectionTime-of-flight CameraThree-dimensional Heterogeneous IntegrationCalibrationApplied PhysicsComputer EngineeringSilicon SensorsIntegrated CircuitsLarge Area ProductionInstrumentationMicroelectronicsOptoelectronicsImage Sensor
| Year | Citations | |
|---|---|---|
Page 1
Page 1