2009 · 34 citations · 6 references
EngineeringElectrical EngineeringMicroelectromechanical SystemsMicroelectronicsMicrowave EngineeringMems DesignMems SwitchesMicrowave FiltersMicrowave ResonatorsRadio-frequency Integrated CircuitsRf MemsBandwidthCapacitive Mems SwitchesCapacitive Rf Mems SwitchesEvanescent-mode FiltersFractional BandwidthInsertion LossTunable FiltersTuning Range
This paper presents a high-Q tunable evanescent-mode cavity filter using capacitive RF MEMS cantilever switches with a frequency coverage of 5.5-4.3 GHz. The filter results in an insertion loss of 2.6-5.3 dB over the tuning range and a 3-dB bandwidth of 55-40 MHz (fractional bandwidth of %1). The measured Q <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">u</sub> of the filter is 511-273 over the frequency range, which is to our knowledge, the best report Q using RF-MEMS technology.
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