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Performance of a 650V SiC Diode with Reduced Chip Thickness
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2012
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Sic DiodeSemiconductor TechnologyElectrical EngineeringSemiconductor DeviceEngineeringHigh Voltage EngineeringSic DiodesWafer ThicknessPower DeviceApplied PhysicsPower Semiconductor DevicePower ElectronicsPower SemiconductorsMicroelectronicsChip Thickness ReductionCarbidePower Electronic Devices
A significant performance gain of 650V SiC diodes is possible by reducing the wafer thickness from the standard thickness of 350 µm to < 150 µm. Not only the differential resistance of the diodes but also the Rth benefit from this chip thickness reduction. As consequence a further chip size reduction with accompanying capacitive charge reduction leads to a device with improved efficiency in PFC applications under both high load and low load conditions.