Simulation in automated material handling systems design for semiconductor manufacturing

Abstract

We present the simulation methodologies used in the design of automated material handling systems (AMHS) at the Intel wafer fabs. The models used in AMHS design can be categorized as AMHS models and production models. The AMHS models support the design of Interbay and Intrabay systems. The Interbay systems handle the material flow between different bays (production centers). The systems handle the material flow within the bays. The production models compliment the AMHS models. We review the general model structures and simulation examples under these categories used in actual system implementations.