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Deposition of silicon nitride thin films by hot-wire CVD at 100 °C and 250 °C

DOIFull Paper Access

29

Citations

8

References

2009

Year

Pedro Alpuim, L.M. Gonçalves, E.S. Marins, T. Viseu, Stanislav Ferdov, J.E. Bourée
Thin Solid Films

References

YearCitations

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