Applied Physics Letters · 2009 · 49 citations · 11 references
Natural SciencesMaterials EngineeringMaterials ScienceOptical MaterialsOpticsThin FilmsChemical Vapor DepositionOptical Thin FilmsThin Film Optical PropertiesDeflection MeasurementGas MixturesLensesMembrane Mechanical PropertiesOptical Property TuningSurface Optical PropertiesSurface PropertiesYoung's Modulus
Nanocrystalline diamond (NCD) membranes of 150 nm thickness and diameters in the millimeter range grown by microwave-assisted chemical-vapor deposition were bulged to investigate their mechanical properties and their use as tuneable optical lenses. The NCD films were grown at different CH4/H2 gas mixtures to vary the sp2/sp3 ratio and thereby to tune their mechanical, optical, and surface morphology properties. By applying gas over pressure the membrane forms a lens shaped geometry. From deflection data we calculated Young’s moduli which decrease with increasing CH4/H2 ratio from 1160 GPa at 0.5% to 900 GPa at 7%. Optical lens applications show a variation in the focal point from infinity to 3.5 mm. The data indicate that NCD is a promising material for tuneable optical lenses applications.
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Properties and growth of diamond
M. Henini · Microelectronics Journal · 1995 · 238 citations
Natural Sciences, Materials Engineering, Materials Science +9
Novel microwave plasma reactor for diamond synthesis
M. Füner, C. Wild, P. Koidl · Applied Physics Letters · 1998 · 203 citations