Self-written waveguide on a VCSEL-emitting window using a photomask transfer method

Abstract

This study is focused on a self-written waveguide (SWW) fabricated using a new photomask transfer method. With the proposed photomask transfer method, an SWW array was successfully fabricated on vertical-cavity surface-emitting laser (VCSEL) diode-emitting windows. It was found that the output power of a VCSEL having the SWW increased as compared to that of VCSEL without the SWW. We have confirmed that the optical output is independent of the placement of the emitting window inside the SWW. Optical coupling between an SWW and a graded-index multimode fiber was also demonstrated