Ripple Technique; a Novel Non-Contact Wafer Emissivity and Temperature Method for RTP - Concepedia

Concepedia

Publication | Closed Access

Ripple Technique; a Novel Non-Contact Wafer Emissivity and Temperature Method for RTP

36

Citations

6

References

1991

Year

Chuck Schietinger, B. Adams, C.B. Yarling

MRS Proceedings

Electrical EngineeringWafer Scale ProcessingEngineeringTemperature MethodApplied PhysicsThermal AnalysisRipple TechniqueThermodynamicsHeat TransferElectronic PackagingMicroelectronicsThermal Engineering

References

	Year	Citations

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