Concepedia

Publication | Closed Access

Defect Control in Nitrogen Doped Czochralski Silicon Crystals

DOI

28

Citations

0

References

1999

Year

Atsushi Ikari, Katsuhiko Nakai, Yuya Tachikawa, H. Deai, Yasumitsu Ohta, Naoya Masahashi, Shinpei Hayashi, T. Hoshino, Wataru Ohashi
Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena

No additional data available for this publication yet. Check back later!