Publication | Closed Access
Effects of internal stresses on the mechanical properties of deposition thin films
50
Citations
13
References
2007
Year
Materials ScienceEngineeringMechanical PropertiesMechanical EngineeringApplied PhysicsDeposition Thin FilmsStressstrain AnalysisInternal StressesThin FilmsPlasticityChemical DepositionChemical Vapor DepositionMechanics Of MaterialsMicrostructureThin Film Processing
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