Mask‐Free Patterning of High‐Conductivity Metal Nanowires in Open Air by Spatially Modulated Femtosecond Laser Pulses

Abstract

A novel high-resolution nanowire fabrication method is developed by thin-film patterning using a spatially modulated femtosecond laser pulse. Deep subwavelength (≈1/13 of the laser wavelength) and high conductivity (≈1/4 of the bulk gold) nanowires are fabricated in the open air without using masks, which offers a single-step arbitrary direct patterning approach for electronics, plasmonics, and optoelectronics nanodevices. As a service to our authors and readers, this journal provides supporting information supplied by the authors. Such materials are peer reviewed and may be re-organized for online delivery, but are not copy-edited or typeset. Technical support issues arising from supporting information (other than missing files) should be addressed to the authors. Please note: The publisher is not responsible for the content or functionality of any supporting information supplied by the authors. Any queries (other than missing content) should be directed to the corresponding author for the article.