Solid-State Dewetting of Thin Films

Carl V. Thompson

Annual Review of Materials Research · 2012 · 1.1K citations · 112 references

Concepts

TL;DR

Solid thin films are metastable and tend to dewet into islands when heated, driven by surface energy minimization and surface diffusion below the melting point, a process that can be undesirable in micro‑ and nanosystems fabrication yet useful for creating nanoscale particle arrays and catalyzing nanowire growth. The authors investigate templated dewetting using patterned surfaces or prepatterned films to generate ordered particle arrays and complex partially dewetted structures, while also exploring how surface energy anisotropy and facets influence shape evolution. They achieve this by patterning surface topography or prepatterning films to guide dewetting, thereby producing ordered arrays of particles and complex partially dewetted structures.

Abstract

Solid films are usually metastable or unstable in the as-deposited state, and they will dewet or agglomerate to form islands when heated to sufficiently high temperatures. This process is driven by surface energy minimization and can occur via surface diffusion well below a film's melting temperature, especially when the film is very thin. Dewetting during processing of films for use in micro- and nanosystems is often undesirable, and means of avoiding dewetting are important in this context. However, dewetting can also be useful in making arrays of nanoscale particles for electronic and photonic devices and for catalyzing growth of nanotubes and nanowires. Templating of dewetting using patterned surface topography or prepatterning of films can be used to create ordered arrays of particles and complex patterns of partially dewetted structures. Studies of dewetting can also provide fundamental new insight into the effects of surface energy anisotropy and facets on shape evolution.

References

112