Nonadiabatic dynamics in energetic negative fluorine ions scattering from a Si(100) surface

Abstract

The dependence of the negative-ion fractions on incident energy and angle is reported for 8.5-22.5 keV F(-) ions scattered from a Si(100) surface at a fixed scattering angle of 38°. The negative-ion fraction increases monotonically with incident velocity for specular scattering. In particular, the variation of the fraction with incident angle is bell shaped for a given incident energy. We interpret this variation using the incident-velocity effect at short distances where the yield of negative ions depends on the number of initial neutrals. It strongly indicates that at short distances, a dynamical equilibrium population is never achieved. This nonadiabatic feature is supported by simple calculations using modified rate equations.