Multichannel Photonic Crystal Wavelength Filter Array for Near-Infrared Wavelengths

Multichannel wavelength filters consisting of 2-D photonic crystal (PhC) for the near-infrared wavelength region (~800 nm) are demonstrated. The filter is a thin-film wavy multilayer structure and is fabricated by the autocloning method, which is based on a radio frequency bias sputtering process. Twelve long-pass-type filter regions are integrated on a common silica substrate. Sharp cutoff characteristics and almost equal channel spacing are experimentally verified. To precisely control the effective lattice constant of PhC, a modulated lattice structure on the substrate is utilized