Vibration Assisted Hot‐Press Sintering of AlN Ceramics

Abstract

AlN ceramics is very difficult to be sintered due to its strong covalent bonds and low self‐diffusion. In this work, a new hot‐press sintering system assisted by vibration was used to densify AlN ceramics. During hot‐pressing process an additional vibration caused by pressure fluctuation is imposed on the sample. The well‐densified AlN ceramics had been obtained at 1750°C under 15 MPa, or at 1800°C under 10 MPa which were much milder than traditional hot‐press conditions and would be beneficial to prolong working life of the graphite mold. The samples made by this method have a bending strength about 320 MPa. After annealing, it shows a thermal conductivity of 217 W/mK.