Publication | Open Access
Fabrication of Metal Nanohole Arrays with High Aspect Ratios Using Two‐Step Replication of Anodic Porous Alumina
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Citations
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References
2005
Year
EngineeringNanoporous MaterialAnodizingNanohole ArraysPolymer PillarsNanostructure SynthesisNanometrologyAnodic Porous AluminaNanolithography MethodMaterials ScienceNanotechnologyNanostructuringMicrostructureNanomaterialsMicrofabricationApplied PhysicsNanofabricationMetal Nanohole ArraysNanoarchitectonics
Metal nanohole arrays with straight holes of high aspect ratio have been fabricated using a new replication process based on the preparation of polymer pillars, both sides of which are supported and can therefore be maintained upright. These nanopillar arrays are demonstrated as negatives for the preparation of metal (Ni) nanohole arrays (see Figure).
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