Grating-coupler based low-loss optical interlayer coupling

Jin Yao, Xuezhe Zheng, Guoliang Li, Ivan Shubin, Hiren Thacker, Ying Luo, Kannan Raj, J. E. Cunningham, Ashok V. Krishnamoorthy

2011 · 30 citations · 8 references

Concepts

Abstract

Optical interlayer couplers with 2.8dB insertion loss and 48nm bandwidth were designed and demonstrated in a commercial 130nm SOI CMOS process. 10Gb/s transmission through an interlayer-coupled link showed a power penalty of <;0.1dB.

References

8