ZnO nanowhiskers on ZnO nanoparticle-deposited Si(111) by MOCVD

Abstract

Vertically aligned ZnO nanowhiskers have been grown on Si substrates spin-coated with ZnO nanoparticles by metal organic chemical vapor deposition (MOCVD) using Me2Zn·tmeda and a mixture of O2 and Ar gases. The ZnO nanowhiskers grown are single crystals with a growth rate of 3 μm h−1.