Publication | Closed Access
Growth of aluminium films by low pressure chemical vapour deposition using tritertiarybutylaluminium
25
Citations
20
References
1994
Year
Materials ScienceAluminium NitrideChemical EngineeringAluminium FilmsEngineeringSurface ScienceApplied PhysicsThin FilmsChemical DepositionChemical Vapor DepositionThin Film ProcessingMicrostructureAnodizing
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